Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications
نویسندگان
چکیده
Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications M. Haykel Ben-Jamaa1 ∗, Pierre-Emmanuel Gaillardon1, Fabien Clermidy1, Ian O’Connor2, Davide Sacchetto3, Giovanni De Micheli3, and Yusuf Leblebici3 1Commissariat à l’Energie Atomique et Aux Energies Alternatives (CEA-LETI), Minatec Campus, 38054 Grenoble, France 2Lyon Institute of Nanotechnology (INL), Ecole Centrale de Lyon University of Lyon, 69134 Ecully, France 3Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
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